|
Energy, MJ 1064 / 532 / 355 / 266 nm |
170 / 110 / 40 / 30 |
Pulse duration, ns 1064 / 532 / 355 / 266 nm |
5–6 / 4–5 / 4–5 / 4–5 |
Pulse repetition rate, Hz |
15 |
The divergence of the output radiation, mrad |
≤0.7 |
The diameter of the output beam, mm |
≤5.0 |
Jitter, ns |
±1.0 |
The stability of the radiation pattern, mrad |
0.1 |
|
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